Back to Article

Advanced Optical Proximity Correction (OPC) Techniques in Computational Lithography: Addressing the Challenges of Pattern Fidelity and Edge Placement Error

Global Journal of Medical Case Reports | Vol 2, Issue 1

Figure 1

Optical Proximity Correction (OPC) Under Immersion Lithography
Figure 1. Optical Proximity Correction (OPC) Under Immersion Lithography